SYSTEM BU

A wide range of chemicals are used for semiconductor production. CCSS(Central Chemical Supply System) supplies various chemicals at an accurate volume and exact timing and it is manufactured in the cleanroom circumstance. We design, manufacture and install the CCSS equipment and its market share is up to 40% in Korea and 80% of Samsung Austin Semiconductor.

Transfer of Chemical

Chemicals are safely transported from the stock area to the Central Chemical Supply System using logistics transfer machines such as lifts and hoists, along with devices like drum pickers and carts.

This process strictly adheres to the 'First In, First Out' principle and is carried out in accordance with established Standard Operating Procedures.

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CCSS Training
& Emergency Training

We are committed to maintaining seamless, round-the-clock operation of our equipment, every day of the year.

This commitment is upheld through safety training for personnel responsible for chemical handling and the provision of training programs covering beginner, intermediate, and advanced levels to ensure thorough comprehension and efficient operation of CCSS supply equipment.

CCSS Risk Factor Removal
& Improvement

By conducting proactive assessments of our supply equipment, we effectively oversee equipment changes and proactively identify potential abnormalities.

This approach allows us to address issues at their nascent stages, averting the risk of serious accidents.

Development Process

Customization

We offer modification services, including equipment and piping construction, tailored to our customers' specific requirements, alongside our regular operational activities.

Adaptation
The system is composed of materials suitable for each chemical property, such as acid, alkali, solvent, etc

Automation
We pursue convenient equipment operation and maximize efficiency through automation.

Safety
Equipment may vary depending on various conditions but safety is the one principle that does not vary or change under any circumstances.

Optimal Solution
From simple supply equipment to complex multifunctional equipment, we can freely implement the optimal solution that meets customer needs, environments, and purposes.

From Chemical Supply to Maintenance

Central Chemical Supply System provides chemicals necessary for semiconductor manufacturing and production processes.

As a partner of semiconductor manufacturers, HanyangENG is always sincere in providing services that meet the needs of our customers.

Clean & Safe Automated Transfer System

The ACQC (Auto Clean Quick Coupler) System prevents external contamination with automatic cleaning and drying functions added to the coupler connection process for transferring the chemicals contained in the tank truck to the large capacity storage tank, and ensures safe chemical transfer by helping the pressurization and exhaustion of the tank truck during the chemical transfer process.

User safety is ensured by installing 2 or more chemical modules in 1 equipment to save space and cost, and automating the entire coupler fastening process, depending on the user environment.

Optimized Solution for Slurry Supply

Slurry is a suspension containing fine solid particles and acts as an abrasive in the semiconductor manufacturing process to polish and planarize wafers or insulating layers both physically and chemically. It serves as a medium for delivering abrasive particles and chemicals to the workpiece, which is the wafer.

Two Drum Configuration

Two in One Configurations

The Safe & Reliable Chemical Waste Disposal Solution

The Chemical Waste Collection system stores and monitors waste chemicals in large tanks, which are discharged during the production of semiconductors and displays. It notifies operators when the accumulated waste chemicals exceed a certain amount. Additionally, this system can safely connect couplers to tank trucks for the safe disposal of waste chemicals. It predicts potential problems that can occur based on the type of waste chemicals and prevents these issues by installing a diluting system or keeping the tank and piping warm.

Drum Automation System that Safely Transfers High-purity Chemicals

The Drum Auto Coupler System (DACS) safely transfers high-purity chemicals supplied in drums to storage tanks. This system includes the process of drum loading and connection, preventing chemical exposure and safety incidents during drum replacement.

By using vision cameras, it measures the information of drums brought into the facility and implements precise connection and supply processes via servo motors. Each module features a one-touch separation method, making maintenance easy.

The Convenient & Reliable Chemical Storage System

The Drum System, the base equipment of the central supply system, stores high-purity chemicals in a drum or a canister that is filtered through the air separator and a high-quality filter using a pump.

The cross-supply method using 2 tanks and nitrogen gas pressurization, guarantees stability and continuity in supply, and can be used for direct supply or transfer, depending on the distance and the required flow rate.

The Optimal Solution for Long-Distance Transfer

The Transfer System is a solution for transferring chemicals from large-capacity storage to equipment that are long-distance using a high-performance pump or controlling the flow rate to supply equipment .

Stability can be secured by installing the equipment at an optimal location when large quantity of chemicals is required, considering the conditions such as flow rate, pressure loss, head, etc.

The Final Chemical Supply Point

The Supply System, responsible for the final delivery of chemicals, stores purified chemicals in a tank and supplies them through a high-quality filter, utilizing nitrogen gas pressurization.

It is custom designed to meet the needs of semiconductor and display manufacturing processes that require an uninterrupted flow of supplies. By duplexing key parts related to supply, it enhances equipment stability.

The Precise and Productive Chemical Mixing Solution

The Mixing System dilutes high-concentration chemicals to the optimal concentration required for semiconductor and display manufacturing processes using DI water. The optimized dilution process and sequential mixing method with tanks ensure high-quality dilution production. The piping configuration, designed with HANYANG ENG’s expertise, maintains stable dilution concentrations.

Automatic Slurry Filter Replacement

Slurry Filter Auto Change System (SFAC) is an automated system designed for replacing filter cartridges essential for the slurry supply system. It securely separates and fastens the filter cartridges, thereby preventing safety accidents and minimizing exposure to chemicals during replacement. Its modular structure ensures easy maintenance, simplifying the system and reducing costs associated with filter replacement.